M/F Post doctoral fellowship entitled “Fabrication and characterization of features obtained by photolithography and electron-beam and their transfer by plasma etching: Mechanistic and qualitative study of the use of green lithography resists”

The Horizon Europe project "Resin Green" is a collaborative project that aims at developing "green" lithography resists for micro and nanofabrication processes in microelectronics.

To achieve these different objectives, the person will work in various laboratory environments (clean rooms, chemistry rooms) for the micro-nanofabrication steps (lithography-etching-deposition) and characterization labs (the consortium has surface analysis instruments such as time-of-flight secondary ion mass spectrometry (ToF-SIMS), Fourier transform infrared (FTIR), X-ray induced photoelectron spectroscopy (XPS), electron microscopy (SEM, TEM), atomic force microscopy (AFM)... ).

Keywords:
Micro-nano fabrication, Plasma etching, Resist, Biosourced polymers, chitosan, alginate.

References
Caillau et al, J. Vac. Sci. Technol. (2017), 35, 06GE01
Sysova et al, ACS Appl. Polym. Mater. (2022), 4, 6, 4508–4519
Servin et al, Appl. Mater. Interf. (2023), 15, 18685-18693
Durin et al, J. Vac. Sci. Technol. (2023), DOI 10.1116/6.0002934

As part of this project, the post-doctoral fellow recruited will have to:
- study the use of bio-based polymers for lithography, in particular chitosan, using electron beams and UV irradiation (from EUV to UV).
- study the interactions of these resists containing different formulation additives with etching plasmas, especially fluorinated plasmas,
- study the quality of patterns transferred by reactive plasma to the substrate.
The post-doctoral fellow will be funded by the Horizon Europe "Resin Green" project and will be hired as a CNRS CDD Researcher.
Work will be carried out at the Institut des Nanotechnologies de Lyon (INL, https://inl.cnrs.fr/) and at ISA (https://www.isa-lyon.fr/) under the supervision of Dr JL Leclercq, Dr Y. Chevolot and Pr D. Léonard. As part of the project, the post-doctoral fellow will work closely with IS2M (Mulhouse), IMP (Lyon) and CEA-Leti (Grenoble), and more generally with all project partners (Greece/Germany/Switzerland). The post-doctoral fellow will participate actively in the consortium progress meetings and any other additional meetings required for the expected progress of the project.

The post-doctoral fellow will have to divide his/her time between the two laboratories INL and ISA. The hiring will be subject to the approval of the Security/Defence Officer and, for foreign candidates, to the issue of the working visa procedure. The security/defence procedure takes two months to be completed, and an additional month may be required to draw up the contract.
Working in cleanrooms: on-site workstation training
Chemical risk: awareness and prevention, on-site training
Compulsory PPE
Travel in France and abroad